Search results for " Materials processing"
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Properties Augmentation of Cast Hypereutectic Al–Si Alloy Through Friction Stir Processing
2022
AbstractThe present endeavour is to augment mechanical attributes via friction stir processing (FSP) in hypereutectic aluminium–silicon castings by the means of microstructural modifications and defects reduction. Wherein, the study proceeds with mainly two approaches namely, alteration in tool revolution (TR) and the number of FSP passes. The prepared specimens were evaluated investigating volume fraction of porosities, microstructural characterizations and microhardness. Therefrom, the specimen with highest number of passes delivered most uniform properties resulting from the reduction in casting porosities and refined silicon particle uniform distribution throughout friction stir process…
Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas
2012
The plasma etch characteristics of aluminum nitride (AlN) deposited by low-temperature, 200 °C, plasma enhanced atomic layer deposition (PEALD) was investigated for reactive ion etch (RIE) and inductively coupled plasma-reactive ion etch (ICP-RIE) systems using various mixtures of SF6 and O2 under different etch conditions. During RIE, the film exhibits good mask properties with etch rates below 10r nm/min. For ICP-RIE processes, the film exhibits exceptionally low etch rates in the subnanometer region with lower platen power. The AlN film’s removal occurred through physical mechanisms; consequently, rf power and chamber pressure were the most significant parameters in PEALD AlN film remova…